Nanostructure fabrication using electron beam induced deposition
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Published in | KENBIKYO Vol. 41; no. 3; pp. 164 - 166 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | Japanese |
Published |
The Japanese Society of Microscopy
2006
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Online Access | Get full text |
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ISSN: | 1349-0958 2434-2386 |
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DOI: | 10.11410/kenbikyo2004.41.164 |