Advanced Three-Dimensional Micromachining by Means of Ultraprecision Milling : 2nd Report, High-Precision Tool Chuch System

• Published in: Transactions of the Japan Society of Mechanical Engineers Series C Vol. 63; no. 614; pp. 3634 - 3640
• Main Authors: SAWADA, Kiyoshi, YAMAMOTO, Akira, TAKEUCHI, Yoshimi, SATA, Toshio
• Format: Journal Article
• Language: Japanese
• Published: The Japan Society of Mechanical Engineers 25.10.1997
• Subjects: High-precision Chucking Mechanism; Lathe-type Ultraprecision Milling Machine; Micromachining; Pseudo ball End mill; Sculptured Surface
• ISSN: 0387-5024; 1884-8354
• DOI: 10.1299/kikaic.63.3634

This study deals with the improvement of ultraprecision micromachining technology by devising a tool chucking mechanism. A lathe-type ultraprecision milling machine equipped with an improved pseudo ball end mill as a cutting tool was designed to create tiny parts with nm-order surface roughness. The dimensional accuracy and surface roughness are significantly influenced by the rotational accuracy of the pseudo ball end mills, which are mounted on the spindle using a chucking mechanism. To meet the requirement, a new chucking mechanism was devised as a substitute of a three-jaw-type chuck to improve the setting repeatability of the tool. The new chucking mechanism enables the tool to be rightly positioned within the range of 0.2 μm. As a result, the ultraprecision milling machine equipped with the chucking mechanism and the tool was able to produce a traditional Noh mask on a copper surface of 1 mm in diameter with a surface roughness of 58 nm (p-v). In addition, it was found that the contour line pattern observed on the mask surface was due to a three dimensional cutter mark.