Introducing a Photoresponse Model of An Optical Microgripper and its Servo System

In this paper, a photoresponse model for an optical microgripper is presented. The optical microgripper makes use of an optical piezoelectric actuator, and its response characteristics can be quantified by the photoresponse model under the irradiation condition. This proposed photoresponse model can...

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Bibliographic Details
Published inTransactions of the Japan Society of Mechanical Engineers Series C Vol. 59; no. 563; pp. 2177 - 2184
Main Authors Hattori, Shinobu, Fukuda, Toshio, Maruhashi, Toshihiro, Nagamori, Shigenobu
Format Journal Article
LanguageJapanese
Published The Japan Society of Mechanical Engineers 25.07.1993
Subjects
Actuator
Bimorph-PLZT
Experiment
Micromachine
Optical Microgripper
Optical Servo System
Photoresponse Model
Simulation
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Summary:In this paper, a photoresponse model for an optical microgripper is presented. The optical microgripper makes use of an optical piezoelectric actuator, and its response characteristics can be quantified by the photoresponse model under the irradiation condition. This proposed photoresponse model can provide information on the photostrictive effect, the pyroelectric effect, and the thermal deformation phenomenon, which are caused by light beam irradiation, and characterize the photoresponse of the bimorph-PLZT actuator. To control an optical microgripper, one can choose a desired photoresponse model according to the controlled object. Based on this model, an architecture for the optical servo system therefore can be designed in many ways. The details of design of an optical servo system for a microgripper are also discussed in this paper.
ISSN:0387-5024
1884-8354
DOI:10.1299/kikaic.59.2177