Structure analysis of ultimately small areas and their imaging by using nm-sized electron beam

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Bibliographic Details
Published inDenshi kenbikyo Vol. 34; no. 2; pp. 135 - 140
Main Authors Hirotsu, Yoshihiko, Tanaka, Nobuo
Format Journal Article
LanguageJapanese
Published The Japanese Society of Microscopy 31.07.1999
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ISSN0417-0326
DOI10.11410/kenbikyo1950.34.135

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ISSN:0417-0326
DOI:10.11410/kenbikyo1950.34.135