An a-Si TFT Array for 15-inch Full-Color High Resolution LCD

We have developed a 15-in. TFT array fabrication process that assures a high production yield for workstation applications. In order to minimize signal delay in our LCDs, we used aluminum for the gate and the source bus-lines.For the gate lines, an aluminum-silicon alloy with a chromium-overcoat was...

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Bibliographic Details
Published inThe Journal of the Institute of Television Engineers of Japan Vol. 47; no. 5; pp. 630 - 635
Main Authors Kawamura, Toshio, Fujii, Ken-ichi, Honda, Kouichi, Iwasaki, Katsuo, Tamura, Tatsuhiko, Koseki, Hideo, Hotta, Sadayoshi
Format Journal Article
LanguageJapanese
Published The Institute of Image Information and Television Engineers 20.05.1993
Subjects
a-Si
LCD
TFT
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Summary:We have developed a 15-in. TFT array fabrication process that assures a high production yield for workstation applications. In order to minimize signal delay in our LCDs, we used aluminum for the gate and the source bus-lines.For the gate lines, an aluminum-silicon alloy with a chromium-overcoat was employed to suppress hillock formation. As for the source lines, a titanium barrier was used to prevent aluminum diffusion into the semiconductor layer. In order to reduce the possibilities of open and cross-over short defects, we have developed gate aluminum-silicon alloy and contact hole tapering processes. Furthermore silicon-nitride and tantalum-oxide double insulators were employed. By utilizing this process, a 15-in. full-color TFT-LCD consisting of 1152×900 pixels has been successfully Placed into production.
ISSN:0386-6831
1884-9652
DOI:10.3169/itej1978.47.630