New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)

Electron spectroscopy such as Auger electron spectroscopy (AES) and reflection electron energy loss spectroscopy (REELS) has been developed as a useful technique for chemical state and compositional analysis of surface regions with high spatial and depth resolution. In this report, we present a newl...

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Bibliographic Details
Published in2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) pp. 1 - 4
Main Authors Uchida, Tatsuya, Ikita, Konomi, Tanaka, Akihiro, Tsutsumi, Kenichi, Ikeo, Nobuyuki, Yokouchi, Kazushiro, Taguchi, Noboru, Tanaka, Shingo
Format Conference Proceeding
LanguageEnglish
Published IEEE 24.07.2023
Subjects
AES
chemical state analysis
Detectors
electron image
electron spectroscopy
Energy loss
Energy resolution
Failure analysis
Imaging
Integrated circuits
REELS
Spectroscopy
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Summary:Electron spectroscopy such as Auger electron spectroscopy (AES) and reflection electron energy loss spectroscopy (REELS) has been developed as a useful technique for chemical state and compositional analysis of surface regions with high spatial and depth resolution. In this report, we present a newly developed spectrum imaging method by using electron spectroscopy which visualizes the elemental distributions on the top surface of the materials from SEM imaging.
ISSN:1946-1550
DOI:10.1109/IPFA58228.2023.10249080