Motional impedance analysis: Bridging the 'Gap' in dielectric transduction

This paper presents an analytical model to estimate the motional resistance for partial air gap capacitively-transduced MEMS resonators. This model serves as a link between the well formulated analytical models for conventional air gap and internal dielectric transduction schemes, thereby helping de...

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Bibliographic Details
Published in2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings pp. 1 - 4
Main Authors Tallur, S., Cheng, T. J., Sridaran, S., Bhave, S. A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.05.2011
Subjects
Atmospheric modeling
Dielectrics
Electrical resistance measurement
Equations
Mathematical model
Predictive models
Resistance
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Summary:This paper presents an analytical model to estimate the motional resistance for partial air gap capacitively-transduced MEMS resonators. This model serves as a link between the well formulated analytical models for conventional air gap and internal dielectric transduction schemes, thereby helping decide which scheme is optimal for a given design frequency. Using this model, we simulate and experimentally verify the motional resistance for a 303MHz polysilicon disk resonator within a 5% range of accuracy.
ISBN:1612841112
9781612841113
ISSN:2327-1914
DOI:10.1109/FCS.2011.5977791