Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resonators with noise-matched high-gain transimpedance CMOS amplifier

In this paper we present a high-transimpedance, low-noise and noise-matched pre-amplifier for integrated CMOS-MEMS sensing devices. The thermomechanical noise of a MEMS resonator has been characterized under atmospheric conditions in order to prove the low input noise of the designed transimpedance...

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Published in2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) pp. 1943 - 1946
Main Authors Sobreviela, G., Riverola, M., Torres, F., Uranga, A., Barniol, N.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2017
Subjects
Capacitive transduction
Low-noise TIA
Microelectromechanical systems
oscillator
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Summary:In this paper we present a high-transimpedance, low-noise and noise-matched pre-amplifier for integrated CMOS-MEMS sensing devices. The thermomechanical noise of a MEMS resonator has been characterized under atmospheric conditions in order to prove the low input noise of the designed transimpedance pre-amplifier. Results of the CMOS-MEMS system in a Pierce oscillator configuration demonstrates the lowest floor noise reported until now in a capacitively coupled CMOS-MEMS oscillator.
ISSN:2167-0021
DOI:10.1109/TRANSDUCERS.2017.7994449