Application of multi-criteria optimization algorithms to numerical material extraction of thin layers through nanoindentaion technique

Current developments and trends in microelectronics are focused on thin layers and novel materials. This leads to application of different test and measurement methods, which are capable to measure basic mechanical properties of such materials on micro-scale and nano-scale. The presented paper focus...

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Bibliographic Details
Published in3rd Electronics System Integration Technology Conference ESTC pp. 1 - 7
Main Authors Dowhan, Lukasz, Wymyslowski, Artur, Janus, Pawel, Ekwinska, Magdalena, Wittler, Olaf
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2010
Subjects
Strain
Strain measurement
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Summary:Current developments and trends in microelectronics are focused on thin layers and novel materials. This leads to application of different test and measurement methods, which are capable to measure basic mechanical properties of such materials on micro-scale and nano-scale. The presented paper focuses on application of the nanoindentation technique in order to extract the basic elastic and elasto-plastic mechanical properties through numerical approaches. In order to extract the elasto-plastic material data of the investigated thin layers the numerical process was designed. First of all, the nanoindentation process was elaborated in FEM Abaqus software. Then, the results were compared to the measurements and processed by the numerical optimization algorithms.
ISBN:9781424485536
1424485533
DOI:10.1109/ESTC.2010.5642971