135-GHz co-planar patch array on BCB/silicon with polymer-filled cavity

This work presents a co-planar patch array on silicon/benzocyclobutene (BCB) with polymer-filled cavities operating at 135 GHz. Backed by a polymer-filled cavity, a single co-planar patch can achieve gain enhancement of 2 dB. The presence of the polymer in the cavity also improves the mechanical sta...

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Bibliographic Details
Published in2011 International Workshop on Antenna Technology (iWAT) pp. 344 - 347
Main Authors Siew Bee Yeap, Zhi Ning Chen, Li Rui, Ho, D S W, Lim Teck Guan
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2011
Subjects
Antennas
Arrays
Cavity resonators
Gain
Polymers
Silicon
Substrates
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Summary:This work presents a co-planar patch array on silicon/benzocyclobutene (BCB) with polymer-filled cavities operating at 135 GHz. Backed by a polymer-filled cavity, a single co-planar patch can achieve gain enhancement of 2 dB. The presence of the polymer in the cavity also improves the mechanical stability of the overall structure. The measured impedance bandwidth reaches up to 18 GHz and 17 GHz for |S 11 | ≤ -10 dB at 135 GHz band for a single element and a 2×2 antenna array, respectively. The gain for the 2×2 array is 11.5 dBi. The antenna is desirable for wafer level packaging due to simplicity, low profile and higher gain performance as compared to antennas fabricated directly onto silicon substrate.
ISBN:9781424491339
1424491339
DOI:10.1109/IWAT.2011.5752313