Analyses of alignment measurement error

Summary form only given. In this article, the alignment patterns that are subject to have some large alignment measurement errors are discussed. Secondly, FFO (FIA focus optimization) is discussed. FFO is an optical alignment technique, which greatly improves the accuracy of FIA (Field Image Alignme...

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Published inMicroprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers p. 310
Main Author Sugaya, A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
Subjects
Image processing
Image sensors
Lithography
Measurement errors
Optical devices
Optical imaging
Optical sensors
Sensor phenomena and characterization
Ultra large scale integration
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Summary:Summary form only given. In this article, the alignment patterns that are subject to have some large alignment measurement errors are discussed. Secondly, FFO (FIA focus optimization) is discussed. FFO is an optical alignment technique, which greatly improves the accuracy of FIA (Field Image Alignment) sensor of Nikon's NSR series.
ISBN:4891140402
9784891140403
DOI:10.1109/IMNC.2003.1268770