Analysis on 3-Dimensional spatial electric field of AFM based anodic oxidation

Atomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to...

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Bibliographic Details
Published in2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) pp. 547 - 552
Main Authors Zenglei Liu, Niandong Jiao, Zhidong Wang, Zaili Dong
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2012
Subjects
AFM
anodic oxidation
electrical fabrication
Substrates
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Summary:Atomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to find out the distribution of the spatial electric field and the relationship between the electric field and parameters. By theoretical analysis we simulated the spatial distribution of the tip/substrate electric field and analyzed the relationship between the electric field and parameters, which were verified by experiments. Our work can provide theoretic support for electric field assisted nanofabrication.
ISBN:1467311227
9781467311229
DOI:10.1109/NEMS.2012.6196835