Tuned electrostatic probe for RF plasma diagnostics

An electrostatic Langmuir probe with self-compensation for use in 13.56 MHz RF-plasmas has been implemented and characterized. A compensating electrode, as well as an RF choke circuit is embedded within the probe body, and tuned to suppress the 13.56 MHz fundamental frequency. Comparing results with...

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Bibliographic Details
Published in28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) pp. 1 - 4
Main Authors Cirino, Giuseppe A., Castro, Raul M., Pisani, Marcelo B., Verdonck, Patrick
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2013
Subjects
compensating electrode
Langmuir probe
Nanostructures
plasma diagnostics
Plasmas
Probes
Radio frequency
Reliability
RF plasmas
Tungsten
Wires
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Summary:An electrostatic Langmuir probe with self-compensation for use in 13.56 MHz RF-plasmas has been implemented and characterized. A compensating electrode, as well as an RF choke circuit is embedded within the probe body, and tuned to suppress the 13.56 MHz fundamental frequency. Comparing results with a bare probe without any compensating circuit are reported. The characteristic curve obtained from the proposed probe shows a maximization of the plasma floating potential, V f , indicating that the probe is well tuned and generating more reliable electrical parameters from the discharge, such as for the electron temperature, T e .
DOI:10.1109/SBMicro.2013.6676142