Three-Dimensional, Electro-Mechanical Simulation of a Silicon Pressure Sensor

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Bibliographic Details
Published inESSDERC '94: 24th European Solid State Device Research Conference pp. 343 - 346
Main Authors Ciampolini, P., Pierantoni, A., Rudan, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.1994
Subjects
Bridge circuits
Conductivity
Mechanical factors
Mechanical sensors
Optical sensors
Optical signal processing
Resistors
Sensor phenomena and characterization
Silicon
Tensile stress
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ISBN:2863321579
9782863321577