The deformable valve pump (DVP)

We present a device for fluid handling which utilizes a novel concept for a reciprocating micropump, employing our high stroke buckling piezo-membraneactuator. Previously we have reported on the valving functionality of the device at 70 kPa of counter pressure. Here, the novel pumping concept of the...

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Bibliographic Details
Published in2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) pp. 1777 - 1780
Main Authors Shabanian, Ardavan, Goldschmidtboeing, Frank, Gowda, Hitesh G. Bettaswamy, Dhananjaya, Chiranjeevi C., Woias, Peter
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2017
Subjects
Actuators
Biomembranes
Buckling Actuator
Deformable Valve Pump
Fabrication
Fluids
High Flowrate
High-Stroke
Micropump
Micropumps
Piezo-Actuator
Valves
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Summary:We present a device for fluid handling which utilizes a novel concept for a reciprocating micropump, employing our high stroke buckling piezo-membraneactuator. Previously we have reported on the valving functionality of the device at 70 kPa of counter pressure. Here, the novel pumping concept of the device is explained. The fabrication methods are described and experimental results are presented. Given its small size, our pump demonstrates an unusually high flowrate of 18.8 ml/min at 27 Hz actuation frequency. One actuator can also drive flow in two pump chambers resulting in up to 25 ml/min of flowrate at only 20 Hz, which demonstrates much higher power efficiency than comparable reported micropumps in the literature.
ISSN:2167-0021
DOI:10.1109/TRANSDUCERS.2017.7994413