Development of CNT Based Sensor Array on a MUMPs Chip

A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that th...

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Bibliographic Details
Published in2006 Sixth IEEE Conference on Nanotechnology Vol. 2; pp. 798 - 801
Main Authors Lai, K.W.C., Ning Xi, Li, W.J., Kwong, C.P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2006
Subjects
Assembly
Carbon nanotubes
CNT sensors
Costs
DEP manipulation
Dielectrophoresis
Manufacturing automation
Manufacturing processes
micro-robotic spotting
Microelectrodes
nano batch fabrication
nano manufacturing
Power dissipation
Production
Sensor arrays
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Summary:A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in, μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices.
ISBN:9781424400775
1424400775
ISSN:1944-9399
1944-9380
DOI:10.1109/NANO.2006.247779