Investigation of on-chip double-shieled QHR device in ac regime

For the investigation of ac performance, two on-chip double-shielded QHR devices and two double-shielded chip carriers were fabricated at National Metrology Institute of Japan and have been studied with ac at Physikalisch-Technische Bundesanstalt. It has been measured that the shape of the i = 2 pla...

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Bibliographic Details
Published in2012 Conference on Precision electromagnetic Measurements pp. 193 - 194
Main Authors Kaneko, N., Schurr, J., Ahlers, F. J., Domae, A., Oe, T., Kiryu, S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2012
Subjects
ac QHR
double-shielded configuration
Electrical resistance measurement
Frequency dependence
Performance evaluation
QHR device
quantized Hall resistance
Resistance
Semiconductor device measurement
Shape measurement
System-on-a-chip
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Summary:For the investigation of ac performance, two on-chip double-shielded QHR devices and two double-shielded chip carriers were fabricated at National Metrology Institute of Japan and have been studied with ac at Physikalisch-Technische Bundesanstalt. It has been measured that the shape of the i = 2 plateaux at zero shield-potential is not flat and the linear frequency dependence of the quantum Hall resistance amounts to -0.14 (μΩ/Ω) /kHz. Deferent shield designs are proposed to reduce the frequency dependence.
ISBN:1467304395
9781467304399
ISSN:0589-1485
2160-0171
DOI:10.1109/CPEM.2012.6250867