Advanced methods for calculating quadrature errors of MEMS gyroscopes

MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between d...

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Bibliographic Details
Published in2013 IEEE SENSORS pp. 1 - 4
Main Authors Kehrberg, Steven, Dorwarth, Markus, Heitz, Markus, Geckeler, Carsten, Mehner, Jan
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2013
Subjects
Correlation
Couplings
Force
Gyroscopes
Micromechanical devices
Oscillators
Sensors
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Summary:MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2013.6688463