Buffer-optimized improvement in RF loss of AlGaN/GaN HEMTs on 4-inch silicon (111)
The effect of different buffer layers on the RF losses of GaN-based high-mobility-transistors (HEMTs) on Si substrate has been studied. It is found that the electron inversion layer induced by the residual tensile stress in AlN buffer is responsible for a dominant loss factor. It is first time such...
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Published in | 2017 China Semiconductor Technology International Conference (CSTIC) pp. 1 - 3 |
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Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.03.2017
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Subjects | |
Online Access | Get full text |
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Summary: | The effect of different buffer layers on the RF losses of GaN-based high-mobility-transistors (HEMTs) on Si substrate has been studied. It is found that the electron inversion layer induced by the residual tensile stress in AlN buffer is responsible for a dominant loss factor. It is first time such mechanisms of the RF loss of GaN/Si is discussed. It is proven that using a thin high-low-high temperature (HLH) AlN buffer reducing the tensile stress in AlN consequently reduces the RF loss. |
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DOI: | 10.1109/CSTIC.2017.7919884 |