Monte Carlo modeling of stiffness of MEMS membrane

Simulation step is nowadays one of the crucial in the design process of the device. It allows estimating the device performance and reducing the cost of the fabrication process. It is also very useful in statistical approach. As technological process is not ideal and always produce some deviation fr...

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Bibliographic Details
Published in2014 Proceedings of the 21st International Conference Mixed Design of Integrated Circuits and Systems (MIXDES) pp. 97 - 100
Main Authors Kosobutskyy, Petro, Komarnutskyy, Mykhaylo, Maj, Cezary, Zajac, Piotr, Szermer, Michal, Zabierowski, Wojciech
Format Conference Proceeding
LanguageEnglish
Published Department of Microelectronics and Computer Scienc 01.06.2014
Subjects
Biomembranes
membrane
MEMS
Monte Carlo
Monte Carlo methods
Performance evaluation
Silicon
Springs
stiffness
Stress
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Summary:Simulation step is nowadays one of the crucial in the design process of the device. It allows estimating the device performance and reducing the cost of the fabrication process. It is also very useful in statistical approach. As technological process is not ideal and always produce some deviation from established parameters, the final device has variable performance. In this paper, the statistical approach using Monte Carlo modelling is presented in order to estimate the stiffness of a rectangular membrane of various length to width ratio.
DOI:10.1109/MIXDES.2014.6872163