Micromachined droplet on demand formation with shear mode piezoelectricity and micron size nozzles

A micromachined droplet formation by using shear mode piezoelectricity and micron size nozzles is presented. The poling design for the shear mode piezoelectric actuator is achieved by both the analysis and experiment. The nozzle plate with the micro-fluidic channel is fabricated by the COMS process...

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Bibliographic Details
Published in5th IEEE Conference on Nanotechnology, 2005 pp. 134 - 137 vol. 1
Main Authors Cheng, C.H., Jung-Tang Huang, Yu-Lin Huang, Fu-Chiang Hsu, Thung-Han Wu, Ching-Cheng Li, Huang, L.S., Shuo-Hung Chang
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Assembly
Biomembranes
Fabrication
Ink jet printing
Liquid crystal displays
Manufacturing processes
Micromechanical devices
Nanoelectromechanical systems
Piezoelectric actuators
Piezoelectricity
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Summary:A micromachined droplet formation by using shear mode piezoelectricity and micron size nozzles is presented. The poling design for the shear mode piezoelectric actuator is achieved by both the analysis and experiment. The nozzle plate with the micro-fluidic channel is fabricated by the COMS process and MEMS post-process. The pressure chamber, immersed micro-fluidic channel and the nozzle plate are fabricated on a single chip. The droplet-on-demand generator with the piezoelectric actuator and the nozzle located on one side of the chip offers planar assembly design for large quantity fabrication with high yield and low cost. The nozzles with diameter of 4 /spl mu/m were fabricated and 1 /spl mu/m nozzle behavior was analyzed. Design, analysis and measurements were presented.
ISBN:0780391993
9780780391994
ISSN:1944-9399
1944-9380
DOI:10.1109/NANO.2005.1500711