Hot-carrier reliability study and simulation methodology development for 65nm technology
In this work, we report degradation study in 65 nm technology NMOS I/O transistors (Tox = 55 A¿) for different channel widths. Devices were stressed at maximum substrate current condition in order to stimulate HCI degradation. These measurements were validated using analytical equations and reliabil...
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Published in | 2009 IEEE International Integrated Reliability Workshop Final Report pp. 124 - 127 |
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Main Authors | , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.10.2009
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Subjects | |
Online Access | Get full text |
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Summary: | In this work, we report degradation study in 65 nm technology NMOS I/O transistors (Tox = 55 A¿) for different channel widths. Devices were stressed at maximum substrate current condition in order to stimulate HCI degradation. These measurements were validated using analytical equations and reliability models extracted to be compatible with Eldo simulation tool using User Defined Reliability Model (UDRM) approach. |
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ISBN: | 9781424439218 1424439213 |
ISSN: | 1930-8841 2374-8036 |
DOI: | 10.1109/IRWS.2009.5383015 |