An RFMEMS based reflection type C-Ku band tunable band pass filter

In this paper, we present a novel band reflection type C-Ku band tunable band pass filter (BPF), which has been developed by surface micromachining technology for wireless applications. Our BPF consists of two identical band rejection filters (BRF) and a coplanar waveguide (CPW) 90-degree hybrid cou...

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Bibliographic Details
Published inTRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 777 - 780
Main Authors Lee, S.-S., Nishino, T., Kitsukawa, Y., Konno, N., Miyazaki, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
Band pass filters
band rejection filter
Bridges
Capacitors
Contacts
Coplanar waveguides
CPW hybrid coupler
Fabrication
Inductors
Micromachining
Reflection
RFMEMS switch
Switches
tunable band pass filter
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Summary:In this paper, we present a novel band reflection type C-Ku band tunable band pass filter (BPF), which has been developed by surface micromachining technology for wireless applications. Our BPF consists of two identical band rejection filters (BRF) and a coplanar waveguide (CPW) 90-degree hybrid coupler. The BRF is composed of metal contact type RFMEMS switches, inductors and capacitors. In the fabrication, a sacrificial layer is applied to not only RFMEMS switch but also inductor, capacitor and CPW 90-degree hybrid coupler to form air bridge, short avoidable structure and enhanced capacitive coupling, respectively. Each tuning state in C- to Ku-band is achieved by RFMEMS switch operation, which selects adequate capacitors or inductors designed corresponding to each tuning state. The insertion losses of the BPF were 3.2 dB, 3.6 dB and 3.5 dB at 8 GHz, 12 GHz and 16 GHz, respectively.
ISBN:1424441900
9781424441907
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285650