A 90nm 4Mb embedded phase-change memory with 1.2V 12ns read access time and 1MB/s write throughput
A 90 nm 4 Mb embedded phase-change memory (PCM) is presented, demonstrating the feasibility of PCM integration with 3 masks overhead in a 6-ML standard CMOS process. Using a low-voltage NMOS transistor as a cell selector leads to a 0.29 ¿m 2 cell size. A 1.2 V low-voltage read operation achieves a 1...
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Published in | 2010 IEEE International Solid-State Circuits Conference - (ISSCC) pp. 268 - 269 |
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Main Authors | , , , , , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.02.2010
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Subjects | |
Online Access | Get full text |
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Summary: | A 90 nm 4 Mb embedded phase-change memory (PCM) is presented, demonstrating the feasibility of PCM integration with 3 masks overhead in a 6-ML standard CMOS process. Using a low-voltage NMOS transistor as a cell selector leads to a 0.29 ¿m 2 cell size. A 1.2 V low-voltage read operation achieves a 12 ns access time. The 3 mm 2 macro features a random write throughput of 1 MB/s and a mode to increase write throughput to 4 MB/s. |
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ISBN: | 1424460336 9781424460335 |
ISSN: | 0193-6530 2376-8606 |
DOI: | 10.1109/ISSCC.2010.5433911 |