Resonant LGS microsensor for scanning microdeformation microscopy

Scanning microdeformation microscopy (SMM) is a near field microscopy in the mesoscopic domain. Such a microscope has become an alternative to the high resolution acoustic microscope that operates at very high frequencies. SMM is based on a vibrating contact tip and piezoelectric detection. The late...

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Bibliographic Details
Published in2009 IEEE International Ultrasonics Symposium pp. 1507 - 1510
Main Authors Douchet, G, Sthal, F, Bigler, E, Leblois, T, Vairac, P
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2009
Subjects
cantilever
Electrodes
Etching
Frequency
Langasite
Microscopy
Microsensors
Optical resonators
Piezoelectric transducers
Resonance
resonator
scanning microdeformation microscopy
Temperature
Ultrafast optics
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Summary:Scanning microdeformation microscopy (SMM) is a near field microscopy in the mesoscopic domain. Such a microscope has become an alternative to the high resolution acoustic microscope that operates at very high frequencies. SMM is based on a vibrating contact tip and piezoelectric detection. The lateral resolution is essentially related to the tip diameter. Classically, the SMM sensor is obtained by a complex mounting process. The tip is glued on a Si cantilever driven by a piezoelectric ceramic. Piezoelectric crystal is an alternative to get a monolithic vibrating cantilever. Quartz crystal, which is the most often used piezoelectric material, can be advantageously replaced by Langasite crystal because of its higher piezoelectric coefficients and its better temperature behaviour.
ISBN:142444389X
9781424443895
ISSN:1051-0117
DOI:10.1109/ULTSYM.2009.5441465