Design and Simulation of MEMS AlN Piezoelectric Vibration Energy Harvester Array for Improved Power Density

This paper presents a micro electro mechanical system (MEMS) based piezoelectric vibration energy harvester. The effect of beam geometry and shape of the proof mass on the resonant frequency is analysed. Here an energy harvester using Aluminum Nitride (AlN) is designed. A complete design flow of the...

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Bibliographic Details
Published in2018 IEEE SENSORS pp. 1 - 4
Main Authors Nisanth, A, Suja, K.J., Seena, V.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2018
Subjects
Aluminum nitride
energy harvester
Energy harvesting
Geometry
III-V semiconductor materials
piezoelectric
Power generation
Resonant frequency
Vibrations
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Summary:This paper presents a micro electro mechanical system (MEMS) based piezoelectric vibration energy harvester. The effect of beam geometry and shape of the proof mass on the resonant frequency is analysed. Here an energy harvester using Aluminum Nitride (AlN) is designed. A complete design flow of the piezoelectric vibration energy harvester for increased output power is proposed. The proposed structure was able to generate an output power of 1.388 mW at a resonant frequency of 576.8 Hz when excited by an input acceleration of 0.5 g. The areal power density of the harvester is 36.06 ų W mm −2 . This proposed energy harvester could be a good candidate for solving the battery power issues related to wireless sensor nodes.
ISSN:2168-9229
DOI:10.1109/ICSENS.2018.8589700