Characterization of flexible pH micro-sensors based on electrodeposited IrOx thin film

In this work, we report polyimide-based biocompatible and flexible pH micro-probes. The sensing electrodes were based on iridium oxide (IrOx) thin film, electrodeposited by a cyclic voltammetry process onto a base sputtered gold (Au) layer. Square electrode configurations with sizes of 1 mm 2 , 500...

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Bibliographic Details
Published in2017 IEEE SENSORS pp. 1 - 3
Main Authors Marsh, Paul, Moore, Wyatt, Clucas, Mark, Ly Huynh, Kyoung-Tae Kim, Soyeon Yi, Hung Cao, Chiao, J.-C
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2017
Subjects
Chemical sensors
Electrodeposition
Electrodes
Gold
Iridium
Iridium Oxide
pH Sensors
Polyimide
Probes
Sensitivity
Sensors
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Summary:In this work, we report polyimide-based biocompatible and flexible pH micro-probes. The sensing electrodes were based on iridium oxide (IrOx) thin film, electrodeposited by a cyclic voltammetry process onto a base sputtered gold (Au) layer. Square electrode configurations with sizes of 1 mm 2 , 500 μm 2 , 300 μm 2 , and 200 μm 2 were designed, fabricated and tested; these yielded sensitivities of ~71 mV/pH, ~62 mV/pH, ~52 mV/pH and ~51 mV/pH, as well as limit of detection (LOD) values of 0.04 pH, 0.047 pH, 0.065 pH and 0.075 pH, respectively. Reference electrodes (REs) were developed by applying AgCl paste onto Au electrodes, followed by a curing process; demonstrating a comparable performance to commercial REs. Our pH micro-sensors hold promise for various applications, from analyses of chemical processes, to in-vitro and in-vivo experiments, to environmental or food safety monitoring.
DOI:10.1109/ICSENS.2017.8234322