A novel method for amorphous metal micromolding using Carbon MEMS

• Published in: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 188 - 191
• Main Authors: Martinez-Duarte, R., Madou, M.J., Kumar, G., Schroers, J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.06.2009
• Subjects: Amorphous materials; Bulk Metallic Glass; C-MEMS; Carbon; Corrosion; Crystallization; Glass; LIGA; Microfabrication; Micromechanical devices; Molds; Rough surfaces; Surface finishing; Surface resistance; Surface roughness; Temperature; Thermoplastic Forming
• DOI: 10.1109/SENSOR.2009.5285533
• ISBN: 1424441900; 9781424441907
• ISSN: 2159-547X

Here we describe a novel method for bulk metallic glass (BMG) micro molding using carbon templates obtained from pyrolyzed SU-8 photoresist. BMGs refer to a class of metal alloys which exhibit high strength, large elastic strain limit, and high corrosion resistance owing to their amorphous nature. They are isotropic, homogeneous, and free from any crystalline defects down to atomic scales. We have employed the carbon MEMS (C-MEMS) technique to derive molds of different geometries and dimensions. Resultant carbon structures are stable at very high temperatures and have sufficient mechanical strength to be used as master molds for the thermoplastic forming of BMGs.