A novel method for amorphous metal micromolding using Carbon MEMS

Here we describe a novel method for bulk metallic glass (BMG) micro molding using carbon templates obtained from pyrolyzed SU-8 photoresist. BMGs refer to a class of metal alloys which exhibit high strength, large elastic strain limit, and high corrosion resistance owing to their amorphous nature. T...

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Bibliographic Details
Published inTRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 188 - 191
Main Authors Martinez-Duarte, R., Madou, M.J., Kumar, G., Schroers, J.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
Amorphous materials
Bulk Metallic Glass
C-MEMS
Carbon
Corrosion
Crystallization
Glass
LIGA
Microfabrication
Micromechanical devices
Molds
Rough surfaces
Surface finishing
Surface resistance
Surface roughness
Temperature
Thermoplastic Forming
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Summary:Here we describe a novel method for bulk metallic glass (BMG) micro molding using carbon templates obtained from pyrolyzed SU-8 photoresist. BMGs refer to a class of metal alloys which exhibit high strength, large elastic strain limit, and high corrosion resistance owing to their amorphous nature. They are isotropic, homogeneous, and free from any crystalline defects down to atomic scales. We have employed the carbon MEMS (C-MEMS) technique to derive molds of different geometries and dimensions. Resultant carbon structures are stable at very high temperatures and have sufficient mechanical strength to be used as master molds for the thermoplastic forming of BMGs.
ISBN:1424441900
9781424441907
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285533