A Gate Dielectric Last Approach to Integrate Organic Based Devices on Plastic Substrates
In this work we demonstrate a photo-lithographic based process to integrate organic-based devices including rectifiers, ring oscillators, current mirrors, inverters, diodes and capacitors on flexible substrates for RFID and flexible display applications. Our integration method includes a seven mask...
Saved in:
Published in | 2008 Flexible Electronics and Displays Conference and Exhibition pp. 1 - 3 |
---|---|
Main Authors | , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.01.2008
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | In this work we demonstrate a photo-lithographic based process to integrate organic-based devices including rectifiers, ring oscillators, current mirrors, inverters, diodes and capacitors on flexible substrates for RFID and flexible display applications. Our integration method includes a seven mask photolithography process that incorporates several discrete devices built with pentacene as the semiconductor and parylene as the gate dielectric and inter-level dielectric (ILD). The maximum temperature for all processes is 120degC. |
---|---|
ISBN: | 1424420539 9781424420537 |
ISSN: | 1947-1939 1947-1947 |
DOI: | 10.1109/FEDC.2008.4483882 |