A Gate Dielectric Last Approach to Integrate Organic Based Devices on Plastic Substrates

In this work we demonstrate a photo-lithographic based process to integrate organic-based devices including rectifiers, ring oscillators, current mirrors, inverters, diodes and capacitors on flexible substrates for RFID and flexible display applications. Our integration method includes a seven mask...

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Bibliographic Details
Published in2008 Flexible Electronics and Displays Conference and Exhibition pp. 1 - 3
Main Authors Gowrisanker, S., Yuming Ai, Quevedo-Lopez, M.A., Huiping Jia, Vogel, E., Gnade, B.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2008
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Summary:In this work we demonstrate a photo-lithographic based process to integrate organic-based devices including rectifiers, ring oscillators, current mirrors, inverters, diodes and capacitors on flexible substrates for RFID and flexible display applications. Our integration method includes a seven mask photolithography process that incorporates several discrete devices built with pentacene as the semiconductor and parylene as the gate dielectric and inter-level dielectric (ILD). The maximum temperature for all processes is 120degC.
ISBN:1424420539
9781424420537
ISSN:1947-1939
1947-1947
DOI:10.1109/FEDC.2008.4483882