Ni2P Contact Technology for 300 mm Si Photonics Platform
In order to assess their potential use as contact layers for Si photonics devices, Ni 2 P thin films were developed on a 300 mm platform. Ni 2 P layers, obtained by magnetron sputtering of a Ni 2 P target, were implemented and integrated on III-V-based structures to extract the contact resistivity o...
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Published in | 2021 20th International Workshop on Junction Technology (IWJT) pp. 1 - 4 |
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Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
JSAP
10.06.2021
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Subjects | |
Online Access | Get full text |
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Summary: | In order to assess their potential use as contact layers for Si photonics devices, Ni 2 P thin films were developed on a 300 mm platform. Ni 2 P layers, obtained by magnetron sputtering of a Ni 2 P target, were implemented and integrated on III-V-based structures to extract the contact resistivity on n-InP and p-InGaAs. Due to its high thermal stability and low contact resistivities, Ni 2 P metallization exhibited the best results among the Ni-based metallizations studied for contacting n-InP layers. |
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DOI: | 10.23919/IWJT52818.2021.9609464 |