Application of SEM with microscopic computer tomography (MCT) to detect multilayer structure IC and VNED

It was demonstrated in this paper that the microscopic computer tomography (MCT) method is a helpful method to study the microstructures of integrated circuits (IC) with the multilayer structures, and it is also a helpful method to study microstructures of other devices such as vacuum nano-electron...

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Bibliographic Details
Published in2005 International Vacuum Nanoelectronics Conference pp. 165 - 166
Main Authors Zhuguan Liang, Ling Xiao, Yiping Lin, Wenguo Hu, Yawen Li, Kailin Zhou, Xinghua Hu, Ping Li, Jian Wang, Rau, E.I.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2005
Subjects
Application software
Application specific integrated circuits
Detectors
Insulation
Microstructure
Nonhomogeneous media
Scanning electron microscopy
Semiconductor devices
Semiconductor materials
Tomography
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Summary:It was demonstrated in this paper that the microscopic computer tomography (MCT) method is a helpful method to study the microstructures of integrated circuits (IC) with the multilayer structures, and it is also a helpful method to study microstructures of other devices such as vacuum nano-electron devices (VNED). The scanning electron microscope (SEM) with the MCT method and MCT detector expands the functions of the normal scanning electron microscope, by which not only we can observe the surface microstructures of IC with the multilayer structures below the insulator layers, but also the microstructures of every layer can be layeredly detected below the surface layer.
ISBN:9780780393844
0780393848
ISSN:2164-2370
DOI:10.1109/IVNC.2005.1619537