Performance degradation of defective MEMS tunable RF filter

The common defects that could occur during the fabrication and long term operation of a tunable bandpass filter using RF MEMS switches are simulated with SONNET. The faulty responses of the defective filter are then analyzed and linked to the defects that cause them. The work carried out aims at bei...

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Bibliographic Details
Published in2007 Asia-Pacific Conference on Applied Electromagnetics pp. 1 - 5
Main Authors Wong, W., Su, H.T., Lee, K.C., Ali, M.A.M., Majlis, B.Y.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2007
Subjects
Band pass filters
Defect
Insertion loss
MEMS
Microswitches
Microwave filters
Radio frequency
Resonator filters
RF Filter
Switch
Switches
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Summary:The common defects that could occur during the fabrication and long term operation of a tunable bandpass filter using RF MEMS switches are simulated with SONNET. The faulty responses of the defective filter are then analyzed and linked to the defects that cause them. The work carried out aims at being able to narrow down and possibly identify the defects quickly in future by measuring the faulty filter responses, thus enabling defects to be screened quickly or for the development of built-in self-testable filter.
ISBN:9781424414345
1424414342
DOI:10.1109/APACE.2007.4603931