Integrated thin-film piezoelectric traveling wave ultrasonic motors

An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor stators ranging in diameter from 1-3 mm using wafer scale MEMS fabrication techni...

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Bibliographic Details
Published in2011 16th International Solid-State Sensors, Actuators and Microsystems Conference pp. 1464 - 1467
Main Authors Smith, G. L., Rudy, R. Q., DeVoe, D. L., Polcawich, R. G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2011
Subjects
Acoustics
Fabrication
Finite element methods
MEMS
Motor
Piezoelectric
Predictive models
PZT
Shape
Silicon
Stators
Ultrasonic
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Summary:An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor stators ranging in diameter from 1-3 mm using wafer scale MEMS fabrication techniques. Using laser Doppler vibrometry (LDV), we have demonstrated traveling waves in the bulk silicon elastic medium of the stator. Furthermore, the resonant modes of the fabricated stators have been modeled, and experimental results agree well with these simulations.
ISBN:9781457701573
145770157X
ISSN:2159-547X
DOI:10.1109/TRANSDUCERS.2011.5969627