Low temperature synthesis of two-dimensional carbon nanosheets as a field electron emission material

In this abstract we report carbon nanosheet synthesis at substrate temperatures lowered by 100-150 degC when utilizing C 2 H 2 , rather than CH 4 , as a precursor. Typical C 2 H 2 carbon nano-sheets were successfully deposited on silicon substrates at 550-600 degC substrate temperatures, with 80-100...

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Bibliographic Details
Published in2007 IEEE 20th International Vacuum Nanoelectronics Conference pp. 104 - 105
Main Authors Mingyao Zhu, Outlaw, R.A., Miraldo, P., Hou Kun, Manos, D.M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2007
Subjects
Atomic layer deposition
Carbon dioxide
Diffraction
Electron emission
Hydrogen
Organic materials
Plasma properties
Plasma temperature
Radio frequency
Scanning electron microscopy
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Summary:In this abstract we report carbon nanosheet synthesis at substrate temperatures lowered by 100-150 degC when utilizing C 2 H 2 , rather than CH 4 , as a precursor. Typical C 2 H 2 carbon nano-sheets were successfully deposited on silicon substrates at 550-600 degC substrate temperatures, with 80-100% C 2 H 2 in H 2 concentrations at a fixed 5 seem total gas flow rate, 30-40 mTorr total gas pressures, and 1000 W input RF power.
ISBN:9781424411337
1424411335
ISSN:2164-2370
DOI:10.1109/IVNC.2007.4480952