Characterization of water vapor permeation through thin film Parylene C

• Published in: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 1892 - 1895
• Main Authors: Menon, P.R., Li, W., Tooker, A., Tai, Y.C.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.06.2009
• Subjects: Microchannel; Microfluidics; Micromechanical devices; Optical films; Parylene C; Polyimides; Reservoirs; Semiconductor device measurement; Temperature; Testing; Transistors; Water vapor permeation

A microfluidic structure to measure water vapor permeation through thin film Parylene C was successfully fabricated and tested. Chips were re-tested multiple times with consistent results. These chips were tested at 20degC, 30%RH and measured WVTR data that matched equivalent wet-cup/beaker tests, s...