Characterization of water vapor permeation through thin film Parylene C

A microfluidic structure to measure water vapor permeation through thin film Parylene C was successfully fabricated and tested. Chips were re-tested multiple times with consistent results. These chips were tested at 20degC, 30%RH and measured WVTR data that matched equivalent wet-cup/beaker tests, s...

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Bibliographic Details
Published inTRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 1892 - 1895
Main Authors Menon, P.R., Li, W., Tooker, A., Tai, Y.C.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
Microchannel
Microfluidics
Micromechanical devices
Optical films
Parylene C
Polyimides
Reservoirs
Semiconductor device measurement
Temperature
Testing
Transistors
Water vapor permeation
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Summary:A microfluidic structure to measure water vapor permeation through thin film Parylene C was successfully fabricated and tested. Chips were re-tested multiple times with consistent results. These chips were tested at 20degC, 30%RH and measured WVTR data that matched equivalent wet-cup/beaker tests, showing that these devices are indeed functional and can be used to measure WVTR with repeatable reliability. Using the Arrhenius Relation and varied temperature testing, activation energies were determined for water vapor through Parylene C that agree closely with literature and also better predicts Parylene C behavior than the previously reported activation energy.
ISBN:1424441900
9781424441907
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285687