Development of 3D-LIGA process to fabricate spiral microcoil

We are forming a LIGA process into 3 dimension (3D), and succeeded in the trial production of a spiral microcoil with diameter 0.5 mm, length 1 mm, coil line width 10 pm, and pitch 20 pm. The LIGA process consists of the X-ray lithography using synchrotron radiation (SR), electroforming technology t...

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Published inDigest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004 pp. 330 - 331
Main Authors Mekaru, H., Kusumi, S., Sato, N., Shimizu, M., Yamashita, M., Shimada, O., Hattori, T.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2004
Subjects
Chemicals
Coils
Copper
Injection molding
Nickel
Production
Resins
Spirals
Temperature
X-ray lithography
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Summary:We are forming a LIGA process into 3 dimension (3D), and succeeded in the trial production of a spiral microcoil with diameter 0.5 mm, length 1 mm, coil line width 10 pm, and pitch 20 pm. The LIGA process consists of the X-ray lithography using synchrotron radiation (SR), electroforming technology to fabricate a metallic mold, and plastic replication technology. In order to apply this process to produce a spiral microcoil, the LIGA process was modified to the 3D processing method. Furthermore, the microcoil was completed by metallization on the surface of a resin core. Fabrication of a master for a metallic mold by 3D X-ray lithography was reported in MNC2003. Detailed conditions in electroforming, replication and metallization processes after 3D X-ray lithography are introduced, and measured characteristics of the spiral microcoil are also reported.
ISBN:4990247205
9784990247201
DOI:10.1109/IMNC.2004.245630