Analysis of Optical Collecting System for MEMS-based Grating Moving Light Modulator

Grating moving light modulator, a MEMS-based movable diffraction grating with electrostatic actuation, can be used for projection displays and relevant applications, its dominant power exchange is between the 0 th and plusmn1 st order by modulating phase of incident light, two optical collecting sys...

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Bibliographic Details
Published in2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems pp. 1335 - 1338
Main Authors Xu Yan, Shanglian Huang, Jie Zhang, Xi Huang, Zhihai Zhang, Hongqiao Fu
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2006
Subjects
diffaction
Diffraction gratings
Displays
Electrostatic actuators
Electrostatic analysis
grating light modulator
MOEMS
Optical design
Optical devices
Optical diffraction
Optical modulation
optical system
Phase modulation
Power markets
projection display
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Summary:Grating moving light modulator, a MEMS-based movable diffraction grating with electrostatic actuation, can be used for projection displays and relevant applications, its dominant power exchange is between the 0 th and plusmn1 st order by modulating phase of incident light, two optical collecting systems based on 0 th , plusmn1 st order operation are designed and analyzed with Fraunhofer diffraction theory and Fourier transforms optics, the latter is more available with theoretical performance of imaging system: optical efficiency eta=30.6%, contrast V=1225, comparing with the simulation results by Coventorware: eta=29.5%, V=740, the decrease results from the warp of the device when pulled down by electrostatic force
ISBN:1424401399
9781424401390
DOI:10.1109/NEMS.2006.334743