A 150 MHz voltage controlled oscillator using lithium niobate RF-MEMS resonator

• Published in: 2017 IEEE MTT-S International Microwave Symposium (IMS) pp. 1307 - 1310
• Main Authors: Kourani, Ali, Yong-Ha Song, Arakawa, Brandon, Ruochen Lu, Junfeng Guan, Anming Gao, Songbin Gong
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.06.2017
• Subjects: Internet of things; Lithium niobate; Micromechanical devices; Phase noise; RF MEMS; Tuning; tuning range; Varactors; VCO; Voltage-controlled oscillators

This paper presents the first radio frequency (RF) voltage controlled MEMS oscillator (VCMO) using a high Q Lithium Niobate (LiNbO 3 ) micromechanical resonator. The resonator has a quality factor of 650 in air with a motional impedance of 262 Ω. The oscillator's measured phase noise is -84.4 d...