A 150 MHz voltage controlled oscillator using lithium niobate RF-MEMS resonator

This paper presents the first radio frequency (RF) voltage controlled MEMS oscillator (VCMO) using a high Q Lithium Niobate (LiNbO 3 ) micromechanical resonator. The resonator has a quality factor of 650 in air with a motional impedance of 262 Ω. The oscillator's measured phase noise is -84.4 d...

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Bibliographic Details
Published in2017 IEEE MTT-S International Microwave Symposium (IMS) pp. 1307 - 1310
Main Authors Kourani, Ali, Yong-Ha Song, Arakawa, Brandon, Ruochen Lu, Junfeng Guan, Anming Gao, Songbin Gong
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2017
Subjects
Internet of things
Lithium niobate
Micromechanical devices
Phase noise
RF MEMS
Tuning
tuning range
Varactors
VCO
Voltage-controlled oscillators
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Summary:This paper presents the first radio frequency (RF) voltage controlled MEMS oscillator (VCMO) using a high Q Lithium Niobate (LiNbO 3 ) micromechanical resonator. The resonator has a quality factor of 650 in air with a motional impedance of 262 Ω. The oscillator's measured phase noise is -84.4 dBc/Hz and -146 dBc/Hz at 1 kHz and 1 MHz offsets respectively from a 149.13 MHz carrier with an output power of -8.6 dBm. The oscillator consumes less than 1 mA with a tuning range of 0.42 MHz. Such VCMOs are envisioned to enable low power, and low phase noise RF signal synthesis for Internet of Things applications.
DOI:10.1109/MWSYM.2017.8058851