Laser machined microsystems for active frequency selective surfaces

This paper presents the large scale integration of laser machined cantilever switches onto frequency selective surfaces for pass-band switching. A sheet of aluminum is patterned through laser cutting and attached by point laser welding to a frequency selective surface. The switch cantilever position...

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Bibliographic Details
Published in2012 IEEE/MTT-S International Microwave Symposium Digest pp. 1 - 3
Main Authors Robben, D., Peik, S. F., Henning, T., Becker, M., Froehner, K.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2012
Subjects
Aluminum
Dielectrics
Frequency Selective Surface
Frequency selective surfaces
Insertion loss
Laser beam cutting
Masers
Measurement by laser beam
RF MEMS
Tunable Filters
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Summary:This paper presents the large scale integration of laser machined cantilever switches onto frequency selective surfaces for pass-band switching. A sheet of aluminum is patterned through laser cutting and attached by point laser welding to a frequency selective surface. The switch cantilever positions are adjusted by local thermal laser heating. As a result the response of the FSS can be shifted by electrostatic actuation of the switches. The design is verified by measurements on a 100 element active FSS at X-Band.
ISBN:1467310859
9781467310857
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2012.6259596