Modeling and Simulation for a Vibratory Tuning-fork MEMS Gyroscope

A vibratory tuning-fork MEMS gyroscope is presented in the study. Design concepts for the gyroscope are obtained by introducing the working principle, the suspension system, and the damping. The dynamical simulation is applied to indicate that this gyroscope has achieved high stability and sensitivi...

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Bibliographic Details
Published in2011 Third International Conference on Measuring Technology and Mechatronics Automation Vol. 2; pp. 605 - 608
Main Authors Wen Yongpeng, Shang Huilin
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2011
Subjects
Capacitance
Damping
Electrodes
Gyroscope
Gyroscopes
Indirect connection structure
MEMS
Micromechanical devices
Slide-film
Suspensions
Tuning-fork
Vibrations
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Summary:A vibratory tuning-fork MEMS gyroscope is presented in the study. Design concepts for the gyroscope are obtained by introducing the working principle, the suspension system, and the damping. The dynamical simulation is applied to indicate that this gyroscope has achieved high stability and sensitivity by the indirect connection structure and slide-film damping in the drive and sense directions. It is found that the novel structural design for the gyroscope can be seemed as a good approach to increase the performance of tuning-fork gyroscope.
ISBN:1424490103
9781424490103
ISSN:2157-1473
DOI:10.1109/ICMTMA.2011.437