Study the Effect of Pd Sensitization on Hydrogen and Methane Sensing Performances of Sol-Gel Grown Nano WO3/SiO2/Si Sensor

The sensing performance of Pd sensitized WO 3 thin film gas sensor has been studied towards hydrogen and methane gases with different concentrations (0.1%, 0.5%, 1%) at the optimum operating temperatures. The Pd surface sensitized Tungsten trioxide (WO 3 ) thin film sensor has been prepared on SiO 2...

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Bibliographic Details
Published in2020 IEEE 1st International Conference for Convergence in Engineering (ICCE) pp. 448 - 451
Main Authors Kantha, Bijoy, Roy, Subhashis, Nandy, Jyotirmoy, Jana, Gour Gopal, Kumar Sarkar, Subir
Format Conference Proceeding
LanguageEnglish
Published IEEE 05.09.2020
Subjects
Gases
Hydrogen
hydrogen sensor
Methane
Methane sensor
operating temperature
Response Magnitude
SEM
Sensors
Surface treatment
Temperature
Temperature sensors
WO 3 thin film sensor
XRD
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Summary:The sensing performance of Pd sensitized WO 3 thin film gas sensor has been studied towards hydrogen and methane gases with different concentrations (0.1%, 0.5%, 1%) at the optimum operating temperatures. The Pd surface sensitized Tungsten trioxide (WO 3 ) thin film sensor has been prepared on SiO 2 /Si substrate by sol-gel deposition technique. The material properties of the thin film sensor have been analyzed by two different techniques (X-ray diffraction (XRD) and Scanning Electron Microscopy (SEM)). The Stability of Pd surface sensitized WO 3 thin film hydrogen sensor have also been studied. The Pd surface sensitized WO 3 hydrogen sensor presents better results in terms of operating temperature, response magnitude compared to Pd surface sensitized WO 3 thin film-based methane senso
DOI:10.1109/ICCE50343.2020.9290503