A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching

This paper describes a comprehensive approach to model and efficiently simulate the behavior of MEMS gyroscopes in presence of beams' anisoelasticity, that causes out-of-plane mechanical quadrature. Special focus is given to the effects of non-vertical etching along the axial direction of flexu...

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Bibliographic Details
Published in2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) pp. 1 - 4
Main Authors Izadi, M., Braghin, F., Giannini, D., Milani, D., Resta, F., Brunetto, M. F., Falorni, L. G., Gattere, G., Guerinoni, L., Valzasina, C.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.03.2018
Subjects
anisoelasticity
Etching
Finite element analysis
Gyroscopes
MEMS gyroscopes
Micromechanical devices
non-vertical etching
Numerical models
Numerical simulation
quadrature error
Three-dimensional displays
wall angle
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Summary:This paper describes a comprehensive approach to model and efficiently simulate the behavior of MEMS gyroscopes in presence of beams' anisoelasticity, that causes out-of-plane mechanical quadrature. Special focus is given to the effects of non-vertical etching along the axial direction of flexural beams, which have been poorly investigated in the literature. A device-level numerical simulation tool to evaluate the effects of beams' anisoelasticity on quadrature is developed and validated through the comparison with 3D FEM simulations.
DOI:10.1109/ISISS.2018.8358126