Study of Statistical Prevention Mechanism in Integrated Microelectronic Device Manufacturing

The variation in manufacturing process is the source of poor quality, less output and high scrap cost in Integrated Microelectronic Device manufacturing. Some issues caused by variation have been talked in previous reports, however, the effective prevention mechanism in manufacturing process is seld...

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Bibliographic Details
Published in2018 International Conference on Electrical Engineering and Informatics (ICELTICs) pp. 35 - 39
Main Authors Hong Chen, Shan Li, Qing Guo, Shuai Shao, JianJiang Shi
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2018
Subjects
Control charts
Integrated Microelectronic Device manufacturing
Manufacturing processes
Measurement System Analysis
Process control
Stability analysis
Statistical Prevention Mechanism
Statistical Process Control Wafer Probing
Temperature measurement
Testing
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Summary:The variation in manufacturing process is the source of poor quality, less output and high scrap cost in Integrated Microelectronic Device manufacturing. Some issues caused by variation have been talked in previous reports, however, the effective prevention mechanism in manufacturing process is seldom mentioned. In this paper the Statistical Prevention Mechanism by system level is proposed to set up from the perspective of quality management. The statistical techniques including Measurement System Analysis and Statistical Process Control are utilized in Statistical Prevention Mechanism. The Statistical Prevention Mechanism works as process control system with real-time data to reduce variation and achieve 4.637% improvement on pass rate, which demonstrates the Statistical Prevention Mechanism is effective and efficient process control system with superiority of average 98.727% pass rate to achieve sufficient process capability and process stability compared to previous publications.
DOI:10.1109/ICELTICS.2018.8548796