Silicon diffractive microlens for compact laser modules

In this paper, we propose a silicon (Si) microlens and an ultra-compact optical sub-assembly (OSA) that consists of the Si microlens and a laser diode (LD) integrated on a Si V-groove substrate for a compact laser module.

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Bibliographic Details
Published inDigest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference pp. 178 - 179
Main Authors Uekawa, M., Sekikawa, R., Shimura, D., Kotani, K., Maeno, Y., Sasaki, H., Takamori, T.
Format Conference Proceeding
LanguageEnglish
Published IEEE 2003
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Summary:In this paper, we propose a silicon (Si) microlens and an ultra-compact optical sub-assembly (OSA) that consists of the Si microlens and a laser diode (LD) integrated on a Si V-groove substrate for a compact laser module.
ISBN:4891140402
9784891140403
DOI:10.1109/IMNC.2003.1268633