Silicon diffractive microlens for compact laser modules
In this paper, we propose a silicon (Si) microlens and an ultra-compact optical sub-assembly (OSA) that consists of the Si microlens and a laser diode (LD) integrated on a Si V-groove substrate for a compact laser module.
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Published in | Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference pp. 178 - 179 |
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Main Authors | , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
2003
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, we propose a silicon (Si) microlens and an ultra-compact optical sub-assembly (OSA) that consists of the Si microlens and a laser diode (LD) integrated on a Si V-groove substrate for a compact laser module. |
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ISBN: | 4891140402 9784891140403 |
DOI: | 10.1109/IMNC.2003.1268633 |