Research on miniature quartz tuning fork with quality factor

• Published in: 2014 9th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) pp. 494 - 497
• Main Authors: Hao Ting Wei, Chun Yu Hsu, Shu Jung Chen
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.10.2014
• Subjects: Crystals; Etching; Groove; Power demand; Q-factor; Quartz; Resonant Analysis; Resonant frequency; Software; Tuning Fork; Vibrations
• ISSN: 2150-5934; 2150-5942
• DOI: 10.1109/IMPACT.2014.7048455

When the conventional quartz tuning fork miniaturizes, high crystal impedance and low quality factor (Q value) of quartz components make quartz components difficulty to operate. The need to reduce digital consumer device has spurred market demand for compact electronics products that reduce the size and consume less power with the same superior functionality. The paper investigates geometric parameters of quartz tuning fork thoroughly to maintain quartz components working efficiency. In this paper, all the designs of quartz tuning fork resonator was simulated analysis software CoventorWare 2010 to reach a better solution in the development of miniature quartz components. There are three kinds of parameters, including depth of grooves, length of cantilever and geometric ratio of length and width of the cantilever is investigated and defined in this paper to obtain high quality factor of the quartz device. The effect between three geometric parameters of quartz components and quartz tuning fork of working efficiency investigates thoroughly. In this paper, the relation among three kinds of geometric parameters in quartz tuning fork is studied. The result of simulation represents that the relation between geometric ratio and frequency is a second-order curve upward. The relation between etching depth of grooves and frequency or quality factor is a second-order curve downward. The relation between shortening length and quality factor maintain a level while length exceeding 643 μm. In conclusion, miniaturization of quartz component is achieved with high Q value and amplitude by analysis software CoventorWare 2010.