Micromirror arrays designed and tested for space instrumentation

Next-generation infrared astronomical instrumentation for ground-based and space telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. We made a full space evaluation of Texas Instruments DMD chips, including tests at cold temperature and in vacuum, life tests, radia...

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Bibliographic Details
Published in2010 International Conference on Optical MEMS and Nanophotonics pp. 195 - 196
Main Authors Zamkotsian, F, Canonica, M, Tangen, K, Lanzoni, P, Grassi, E, Barette, R, Fabron, C, Waldis, S, Noell, W, de Rooij, N, Marchand, L, Duvet, L
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2010
Subjects
Aerospace electronics
astronomical instrumentation
Cryogenics
micromirror array
Micromirrors
MOEMS
multi-object spectrograph
space instrumentation
Telescopes
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Summary:Next-generation infrared astronomical instrumentation for ground-based and space telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. We made a full space evaluation of Texas Instruments DMD chips, including tests at cold temperature and in vacuum, life tests, radiations, and vibrations and shocks. These results do not reveal any show-stopper concerning its ability to meet environmental space requirements. In parallel, a 100×200μm 2 micro-mirror array was successfully designed for cryogenic temperature, fabricated and tested at 92K. Large micromirror arrays of 20'000 micromirrors have also been fabricated. These tests demonstrate the full ability of this type of components for space instrumentation.
ISBN:1424489261
9781424489268
ISSN:2160-5033
DOI:10.1109/OMEMS.2010.5672119