RF MEMS miniature-switched capacitors with pull-down and pull-up electrodes for high power applications

This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2 switch array has three operation states: up-state, down-state and up-up state (switch attached to the pull-up electrode), with capacitances of 115...

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Published in2011 IEEE MTT-S International Microwave Symposium pp. 1 - 4
Main Authors Sedaghat-Pisheh, H., Mahameed, R., Rebeiz, G. M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2011
Subjects
Area measurement
Coplanar waveguides
Microelectromechanical systems (MEMS) devices
Micromechanical devices
microwave switches
Radio frequency
RF MEMS
Switches
Thickness measurement
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Abstract This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2 switch array has three operation states: up-state, down-state and up-up state (switch attached to the pull-up electrode), with capacitances of 115 fF, 370 fF and 64 fF, respectively. The pull-up electrode increases the capacitance ratio from 3.2 (standard operation with no pull-up electrode) to 5.8. The pull-up electrode also solves the problem of RF self actuation and the 2×2 switch was tested up to 4 W at 5 GHz (pull-up electrode engaged) with no change in the measured S-parameters.
AbstractList This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2 switch array has three operation states: up-state, down-state and up-up state (switch attached to the pull-up electrode), with capacitances of 115 fF, 370 fF and 64 fF, respectively. The pull-up electrode increases the capacitance ratio from 3.2 (standard operation with no pull-up electrode) to 5.8. The pull-up electrode also solves the problem of RF self actuation and the 2×2 switch was tested up to 4 W at 5 GHz (pull-up electrode engaged) with no change in the measured S-parameters.
Author Sedaghat-Pisheh, H.
Mahameed, R.
Rebeiz, G. M.
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Snippet This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2...
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SubjectTerms Area measurement
Coplanar waveguides
Microelectromechanical systems (MEMS) devices
Micromechanical devices
microwave switches
Radio frequency
RF MEMS
Switches
Thickness measurement
Title RF MEMS miniature-switched capacitors with pull-down and pull-up electrodes for high power applications
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